设备管理分析系统（Equipment Handling System）

Introduction

The Equipment Handling System (EHS) is designed to assist equipment engineer with the implementation of maintenance strategies for the Wafer Production machines at the beginning. It is enriched the function and features after several modification to make it more generic for other production equipments. The system provides analysis reports, equipment status overview, parts inventory control and preventive maintenance planning to ensure that each equipment can be fully utilise and reduce the down time efficiency.

Functions Guide

1.      System Configuration

This function covered all system setting such as:

-          Status definition

-          Setup the display colour for each status

-          Status category and sub category

-          Status access permission

-          Equipment access permission

-          Inventory store access permission

2.      Equipment Status Monitoring

User is able to monitor the current status of each equipment on the Production line.  With link up the WIP System such as WTS and ADTS, all status can be updated automatically when start or finish any production process.

At the mean time, authorized user can be able to change the status manually to reflect the real situations.

3.      Preventive Maintenance Planning

This function provides the ability for user to implement the maintenance strategies.  User can define a standard check sheet which is a set of procedures for checking when doing maintenance time.  EHS will send email to alert user from 1 hour to 24 hours in advance depends on the users setting.

In addition, the detail of any preset PM schedule can be reviewed easily.

4.      Equipment Analysis Report

In order to improve the maintainability and enrich the prediction ability, the Equipment Utilisation Chart can calculate the Mean Time To Repair (MMTR) and Mean Time Between Failure (MTBF) figure for user to analysis.

The daily status change can be reviewed by different time frame for any group of equipment or particular equipment.

All failure status distribution are shown in pie chart to enrich the analysis efficiency.

The Status Summary shows the status distribution for a group of equipment or particular equipment within the selective time frame.

The Equipment Status Weekly Report shows the changes of each 4 hours of some critical status (defined by user) for the selective equipment.

5.      Parts Inventory Control

Parts replacement is necessary due to equipment failure or during the preventive maintenance.  The parts inventory control helps user to ensure there are sufficient parts to replace during equipment failure or PM.

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